Vacuum evaporation machine is like "admission ticket" to produce OLED panel

In the future, the main material of all kinds of terminal screens that can be rolled, light and thin like paper is OLED (Organic Light Emitting Diode). The most important part of the OLED production process is "steaming", and the process is extremely difficult.

The vacuum evaporation machine is like the "heart" of the OLED panel process. It is exclusively occupied by Japan's Canon Tokki in the high-end market. It is not too much to say that it has the throat of the OLED industry. The industry's annual output forecast is usually a few to a dozen. between. You can't buy it if you have money, and that's what it says.

It is a pity that at present, there are no enterprises producing vapor deposition machines in China, and we have no say in this field.

This device is like an "admission ticket" for the production of OLED panels

Buying Canon Tokki's equipment is like getting an "admission ticket" for the production of OLED panels. Canon Tokki's reputation in the industry is very much like the top lithography company ASML, a god-like existence.

Vacuum evaporation machine is like "admission ticket" to produce OLED panel

There are only more than 300 employees, but they basically monopolize the global supply of vacuum evaporation machines. Each quotation exceeds 100 million US dollars. It is still difficult to find a single machine. Waiting in line for goods has become the norm.

It is said that the important prerequisite for the mass production of BOE's 6th generation flexible OLED production line in advance is that it has obtained Canon Tokki's vacuum evaporation machine. The reason why Samsung can monopolize the production and supply of small and medium-sized OLEDs is also because of the help of Canon Tokki.

There are more than one vapor deposition equipment manufacturer. Why is Canon Tokki hard to find one machine? Because its mass production is stable and the advantages of mature technology are unmatched.

Can I get a good product rate when I buy Canon Tokki equipment? otherwise.

Luo Haoyuan, a partner of Zhongyue Jinqiao Investment, told a reporter from Science and Technology Daily: "Although vapor deposition equipment is a key link in OLED production, a production line must achieve mass and high-quality production, and scientific management and integration of the entire production chain, Ensure that each process is controllable and reliable. However, there is no vacuum evaporation equipment, so there is no way to talk about it. "

Canon Tokki can control the deposition error within 5 microns

Vapor deposition is the key to the OLED manufacturing process, which directly affects the display of the OLED screen. The job of the vapor deposition machine is to accurately, uniformly and controllably vaporize the OLED organic light-emitting material onto the substrate.

Vacuum evaporation machine is like "admission ticket" to produce OLED panel

A large number of organic materials used in OLED display panels are easily affected by oxygen and water, and pollution is easily caused between organic materials. Therefore, the evaporation of panels is generally performed in a vacuum environment and is independent of each other.

By means of current heating, electron beam bombardment heating and laser heating, the vaporized material is evaporated into atoms or molecules. They move in a linear motion with a large free path, collide with the surface of the substrate and condense to form a thin film. This process is vacuum Evaporation.

"In layman's terms, every pixel of an OLED screen is steamed up. In addition to luminescent materials, metal electrodes, etc. are also steamed up, the actual operation is very complicated.

Canon Tokki can control the error of vapor deposition of organic light-emitting materials on the substrate within 5 microns, what is the concept? 1 micron is equivalent to 1% of the hair diameter. Luo Haoyuan said, "No other company's evaporation machine can achieve this accuracy. "

Concentrating on a field for more than 20 years, Canon Tokki has many patents. For example, it has applied machine vision to devices very early. In the production process, it is very difficult to align the glass substrate and the fine metal mesh used as the pixel template. Using camera tracking, Canon Tokki can reduce the error range to the size of human red blood cells.

This is a multi-dimensional, three-dimensional comprehensive breakthrough

As said by Professor Ouyang Zhongcan, an academician of the Chinese Academy of Sciences and the Institute of Physics of the Chinese Academy of Sciences, China's flat panel display is the world's first, but it is big but not strong. China's OLED enterprises are mainly concentrated in the application areas of display terminal products such as panels and mobile phones in the middle and lower reaches of the industrial chain, and the upstream core production equipment depends entirely on imports.

At that time, Samsung selected Canon Tokki from more than 40 evaporation machine manufacturers around the world. During the OLED industry's dormant period, Tokki was still fully supported when it encountered a bankruptcy crisis. This kind of adversity friendship allowed Samsung to exclusively win all Canon Tokki. Yield.

Vacuum evaporation machine is like "admission ticket" to produce OLED panel

Zhang Guobin, the founder of the Electronic Innovation Network and a semiconductor technology expert, told the Science and Technology Daily reporter: "Although Samsung may not be able to play without Canon Tokki, Samsung's judgment and grasp of industry trends and technologies deserve our introspection."

Luo Haoyuan agrees with Zhang Guobin's point of view: "Specifically, the vacuum evaporation machine, which is a core equipment that jams the throat of the industry, is confused whether it can be pursued and how it is pursued. We have formed an industrial scale in the short term, but we are unable to achieve independent R & D and equipment capabilities of high-end equipment. This problem will not be solved, let alone the vacuum evaporation machine, and other OLED equipment breakthroughs will be empty talk.

Yuan Tong, executive deputy secretary-general of the China Electronic Materials Industry Association, believes that materials or equipment are not a single product. It involves a systematic process and technology of the panel. If the supporting enterprises alone can only achieve a certain material Or domestic substitution of equipment. Luo Haoyuan said: "This is a multi-dimensional, three-dimensional comprehensive breakthrough."

The difficulty of OLED production is in precision manufacturing, and the technical barriers to precision manufacturing are in precision equipment. Although the domestic large-scale OLED production line equipment is still blank, the OLED scientific research evaporation equipment has reached the international level, and the pilot production equipment has been successfully developed. "Although it's a bit far from getting rid of the 'vacuum', it is on the road anyway." Luo Haoyuan said.

"The lack of core equipment such as vacuum evaporation machines reflects the shortcomings in China's basic research, precision machining, automation control and other fields." Luo Haoyuan said, "Although it is difficult, but one generation has a generation of tasks, I hope that our The first generation can produce a vacuum evaporation machine. "

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