MIM unit structure
MIM is a sandwich structure composed of three layers of metal, insulator and metal. The MIM structure used for liquid crystal display is shown in Figure 1, there are two main types: (1) Figure 1 (a) is a relatively common "T" -shaped structure. The technological process of this structure is relatively simple, and the MIM developed in the early stage is basically in this form. However, the MIM area of ​​this structure is relatively large and has a large parasitic capacitance, which is detrimental to improving contrast and improving its display quality. If you want to reduce its area, you need a large area,
High-resolution lithography equipment. Not only does it increase the difficulty of the manufacturing process, the yield decreases, but it also increases the cost, and it is not suitable for large-scale display. (2) Figure 1 (b) shows the developed lateral MIM structure, which is formed laterally on the scan line
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