Main features and advantages of MEMS sensors

inductance

a. Can improve the signal to noise ratio. The signal can be amplified before the signal transmission on the same chip to improve the signal level, reduce the interference and transmission noise, especially when performing A/D conversion on the same chip, the signal-to-noise ratio can be improved.

b. Improve sensor performance. Because the sensor integrates sensitive components, amplifier circuits, and compensation circuits (such as miniature pressure sensors), it has signal processing functions while performing sensing detection on the same chip (the feedback circuit on the same chip can improve the output tantalum capacitance. Linearity and Frequency Response Characteristics: Because the compensation circuit is integrated, the error caused by temperature or strain can be reduced; the voltage current source on the same chip can provide automatic or periodic self-calibration and self-diagnosis.

c. The adjustment function of the output signal. The integrated circuit on the chip can perform signal conditioning and processing such as A/D conversion, impedance matching, output signal formatting, and signal averaging before signal transmission.

d. MEMS sensors can also integrate multiple identical sensitive components on the same chip to form a sensor array (such as a miniature tactile sensor); or integrate different sensitive components on the same chip to achieve multi-function sensing (such as micro gas sensor) ). C%ddze. Because the MEMS sensor is small in size and extremely light in weight, the influence of factors such as the added capacitance and the quality of the MEMS sensor on the system under test can be neglected, which can improve the measurement accuracy.